Quality Assurance of Electrostatic Micro-Electro Mechanical Relays: Radiation Hardness

Abstract

As electrostatic Micro-Electro Mechanical relays have the potential to solve power density issues related to current MOSFET technology, it has become ever more important to examine device reliability. Beyond applications on earth, MEM devices could promise to reduce overhead power consumption aboard spacecraft. Thus this paper provides a brief history of radiation hardness in MEM devices. The experimental effects of radiation on device performance are then examined and device degradation is discussed. Finally the efficacy of this technology for industry, in the near future, is gauged.