Date of Award

Spring 2012

Document Type



Chemistry & Physics

First Advisor

Colin Thomas

Second Advisor

Kyle Strode

Third Advisor

Anthony Szpilka


As electrostatic Micro-Electro Mechanical relays have the potential to solve power density issues related to current MOSFET technology, it has become ever more important to examine device reliability. Beyond applications on earth, MEM devices could promise to reduce overhead power consumption aboard spacecraft. Thus this paper provides a brief history of radiation hardness in MEM devices. The experimental effects of radiation on device performance are then examined and device degradation is discussed. Finally the efficacy of this technology for industry, in the near future, is gauged.